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Advanced Lithography for Integrated Systems Lab. (ALIS)

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Full wafer scale near zero residual nano-imprinting lithography using UV curable monomer solution
  • AuthorH. Lee and G.Y. Jung
  • Year2005
  • SourceMicroelectronic Eng., 77, 42 (2005)

Wafer to wafer nano-imprinting lithography with monomer based thermally curable resin
  • AuthorH. Lee and G.Y. Jung
  • Year2005
  • SourceMicroelectronic Eng., 77, 168 (2005)

One kilobit cross-bar molecular memory circuits at 30 nm half pitch fabricated by nanoimprint lithography
  • AuthorW. Wu, G.Y. Jung, D.L. Olynick, J. Straznicky, Z. Li, X. Li, D.A.A. Ohlberg, W.M. Tong, S.Y. Wang, and R.S. Williams
  • Year2005
  • SourceAppl. Phy. A., 80, 1173 (2005)

Ultra-smooth platinum surfaces for nanoscale devices fabricated using chemical mechanical polishing
  • AuthorM. Saif Islam, G.Y. Jung, T. Ha, D.R. Stewart, Y. Chen, S.Y. Wang, and R.S. Williams
  • Year2005
  • SourceAppl. Phy. A., 80, 1385 (2005)

Improved pattern transfer in nanoimprint lithography at 30 nm half-pitch by substrate-surface functionalization
  • AuthorG.Y. Jung, W. Wu, W.M. Tong, S.Y. Wang and R.S. Williams
  • Year2005
  • SourceLangmuir, 21, 6127 (2005)

Fabrication of multi-bit crossbar circuits at sub-50 nm half-pitch by using UV-based nanoimprint lithography
  • AuthorG.Y. Jung, W. Wu, H. Lee, S.Y. Wang, W.M. Tong and R.S. Williams
  • Year2005
  • SourceJ. Photopoly. Sci. Technol., 18, 565 (2005)

Issues on nanoimprint lithography with a single-layer resist structure
  • AuthorG.Y. Jung, W. Wu, S. Ganapathiappan, D.A.A. Ohlberg, M. Saif Islam, X. Li, D.L. Olynick, H. Lee, Y. Chen, S.Y. Wang, W.M. Tong and and R.S. Williams
  • Year2005
  • SourceAppl. Phy. A., 81, 1331 (2005)

Micro-casted silicon carbide nano-imprinting stamp
  • Year2004

Fabrication of molecular-electronic circuits by nanoimprinting lithography at low temperature and pressure
  • AuthorG.Y. Jung, S. Ganapathiappan, X. Li, D.A.A. Ohlberg, D.L. Olynick
  • Year2004
  • SourceY. Chen, W.M. Tong, R.S. Williams, Appl. Phys. A., 78, 1169 (2004)

Template stripping using cold-welding
  • AuthorJ.J. Blackstock, Z. Li and G.Y. Jung
  • Year2004
  • SourceJ. Vac. Sci. Technol. A., 22(3), 602 (2004)
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